On-line lecture notes for MEMS class

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• Introduction and overview
  • 1/5/01 version: pdf file (about 880K).
  • powerpoint via browser .
• Basic materials (silicon crystal structure, impurities, defects) pdf file (500K)
• Grown and deposited thin films (pdf, 250K)
• Lithography (pdf, 360K)
• Etch (pdf, 390K)
• Special processes (pdf, 64K)
• Thermal and mechanical properties (pdf, 99K)
• Electrical properties of materials (pdf, 39K) .
• Force/actuation mechanisms (pdf, 100K) .
• Case study: microbolometers (pdf, 633K) .