Also see our paper on this topic:
J. Han and D. P. Neikirk, "Deflection behavior of Fabry-Perot pressure sensors having planar and corrugated membrane," SPIE's Micromachining and Microfabrication '96 Symposium: Micromachined Devices and Components II, R. Roop and K. Chau, Proc. SPIE 2882, Austin, Texas, USA, 14-15 October, 1996, pp. 79-90.
Other work on Fabry-Perot Based Pressure Transducers .
For an enlarged view of any slide, just click on the slide of interest (typical file size about 70K).
