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Last updated on 06/28/01 .
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Microelectronics Fabrication Teaching Laboratory Test Chip
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS): FABRICATION AND DEVICE APPLICATIONS
This course was offered for the first time here at UT-Austin in the spring of 2001. The overall objective of this class is simple: what good are “micro-machines”? The class contains an overview of some of the processing techniques commonly used for MEMS fabrication.and then discusses applications of MEMS technology to actuation and sensing.