Summary of micro pumps and valves

• micropumps use moving parts:

  • piezoelectric, thermo-pneumatic, pneumatic , electrostatic actuation

    • flap or membrane is used for the definition of flow direction of the fluid
  • problems: high temperature processing for wafer bonding and blocking of optical paths for detection, long term reliability

    • room temperature HF bonding
    • lamination using dry film resists

• micropumps without moving parts:

  • micro bubble pump: use variation in vapor pressure and surface tension

    • requires vaporization
  • Electro-Hydro- Dynamic (EHD) pump:

    • electric field & magnetic field
    • electric field alone

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