Micromachining of new chemical sensing platforms


Click here to start

Table of Contents

Micromachining of new chemical sensing platforms

Using integrated circuit manufacturing to make “micro” machines

Where are the targets of opportunity for "small" machines?

MEMS-like sensing devices

Basic micromachining process: bulk micromachining

Mechanical Properties of Membrane

Basic micromachining processes: surface micromachining

Bead sensors in micromachined storage wells

Bead “taste-buds” in micromachined arrays

Other fluidic components: basic pumps

Summary of micro pumps and valves

Principle of EHD pump

Possible fabrication process

Storage wells with EHD micropump

New strategies

Author: Dean Neikirk

Email: neikirk@mail.utexas.edu

Download presentation source