Micromachining of new chemical sensing platforms
Using integrated circuit manufacturing to make “micro” machines
Where are the targets of opportunity for "small" machines?
MEMS-like sensing devices
Basic micromachining process: bulk micromachining
Mechanical Properties of Membrane
Basic micromachining processes: surface micromachining
Bead sensors in micromachined storage wells
Bead “taste-buds” in micromachined arrays
Other fluidic components: basic pumps
Summary of micro pumps and valves
Principle of EHD pump
Possible fabrication process
Storage wells with EHD micropump
New strategies
Email: neikirk@mail.utexas.edu
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