Micromachined Fabry-Perot Pressure Transducers

Youngmin Kim*, Jaeheon Han, and Dean P. Neikirk

The University of Texas at Austin

Department of Electrical and Computer Engineering

http://weewave.mer.utexas.edu/

e-mail: neikirk@uts.cc.utexas.edu

*current address: Texas Instruments

This work was sponsored by the Advanced Research Projects Agency (ARPA) Embedded Microsystems Program under contract # DABT63-92-C-0027 AMD P00002- DOD-ARPA.