Index of Lecture Notes Files

You must be an enrolled student in this class to obtain a copy of these viewgraphs; some material contained on these viewgraphs may be used only on a "fair-use" educational basis. Password required for access to this material.

• I am putting the Powerpoint files here directly (as well as the pdf versions below) as a Powerpoint show (.pps file). For the pps files, if you right-click the link and chose "save target as" you can download the file to your computer, then with Powerpoint running, chose "open" for that file; you can then print several slides to the page (print the "notes" rather than the slides).  
  • safety 2005 version.
  • lab tour 2005 version.
  • introduction 2006 version.
  • crystal sructure, dopants, impurities, defects 2006 version.
  • bulk crystal growth and wafer formation 2006 version.
  • oxidation 2006 version.
  • diffusion 2006 version
  • implant 2006 version.
  • layer characterization 2006 version.
  • thin film deposition 2006 version.
  • epitaxy 2006 version.
  • metals 2006 version.
  • lithography 2006 version.
  • etch 2006 version.
  • final review 2006 version.
• PDF copy of viewgraphs used in lecture.
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  • introduction to IC fab and devices 2006 version.
  • crystal structure, dopants, impurities, defects  2006 version.
  • bulk crystal growth and wafer forming 2006 version.
  • oxidation 2006 version.
  • diffusion 2006 version.
  • implant  2006 version.
  • layer characterization  2006 version.
  • thin film deposition (PVD and CVD); 2006 version.
  • epitaxy 2006 version.
  • metals  2006 version.
  • lithography 2006 version.
  • etch 2006 version.
  • final lecture review slides 2006 version.
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